Used SEZ / LAM RESEARCH SP 101 #9276809 for sale

SEZ / LAM RESEARCH SP 101 is an etching and ashing equipment designed for both wet and dry etching. It is an ideal tool for a variety of process R&D applications such as wafer surface passivation, wafer back-grinding and thin-film deposition. SEZ SP 101 is based on SEZ/LAM's proven etching and ashing technologies. This system delivers enhanced process uniformity and repeatability. The integrated process hardware and flexible software control solution allows LAM RESEARCH SP 101 to process a wide range of substrates such as semiconductor wafers, nanowires, solar cells and thin-film devices. SP 101 is designed to provide precise control over the sample's environment that is critical for precise process control. It features an advanced temperature chamber controller and the capability of maintaining a precise temperature profile within the sample chamber to get the best possible process control. Moreover, SEZ / LAM RESEARCH SP 101 also provides accurate etching parameters through its integrated programmable electron beams. This allows for precise sputtering, chemically etching, and ashing of materials. The unit also includes a clean sweeping technology. This allows for better wafer cleanliness, ensuring a smooth surface for further patterning and thin-film deposition. SEZ SP 101 is user friendly, featuring an easy to use graphical user interface (GUI). Through the GUI, users are able to choose the process recipe, enter etching parameters and store process recipes for future use. The intuitive GUI also allows for efficient multistep etching and ashing process control. LAM RESEARCH SP 101 is a reliable and robust etching and ashing machine that is designed to fulfill the needs of research laboratories. It features accurate process control, enabling precise thin-film deposition, as well as improved uniformity and repeatability. Moreover, its user-friendly graphical interface simplifies etching and ashing setup while allowing the user to store process recipes for future use.