Used SEZ / LAM RESEARCH SP 201 #293593037 for sale

SEZ / LAM RESEARCH SP 201 is a state-of-the-art, high-precision plasma etching and ashing system. It is an excellent choice for applications requiring precise placement, selective removal, directional surface texture, and delicate etching of dielectrics. Utilizing plasma generated by an RF power supply, with an optional bias voltage, SEZ SP 201 is capable of high-quality patterning of intricate structures on substrates of different materials, including semiconductor, metal, and plastics. LAM RESEARCH SP201 is equipped with a 25-cm wafer size, ,2 - 3.3 W/cm2 gas power average, and target-to-wafer distance of 25 cm. It also features a 1250-degree C maximum temperature and current range up to 30 mA. These features combine to create a high level of versatility and accuracy that allows it to achieve some of the highest quality results in the etching industry. Designed to increase the etching and ashing precision and accuracy, SEZ / LAM RESEARCH SP201 is equipped with an 'auto tune' feature which helps to ensure an optimum match between the RF source and substrate. This eventually results in a higher throughput and improved quality. In addition, the chamber features a floating high-efficiency vacuum pump, wafer-level calibration, an auto-leveling chuck, precise software controllable 'etch-rate tracking', and a powerful computer-controlled LCD display for accurate viewing. SEZ SP201 is maintained and serviced by a team of skilled engieners, who provide continuous support and maintenance. Specialized safety features such as pressure relief valves and gas regulator monitors are included to ensure risk-free operations. Safety measures are in place to protect operators from any health concerns related to plasma operations. All in all, LAM RESEARCH SP 201 etcher/ asher is a dependable and precise equipment for etching and ashing with exceptional accuracy and throughput. It is well-suited for applications requiring precise placement, selective removal, directional surface texture, and delicate etching of different substrates. For those looking for a machine that offers high levels of accuracy and consistency, SP 201 is an ideal choice.