Used SEZ / LAM RESEARCH SP 201 #9361814 for sale

SEZ / LAM RESEARCH SP 201 is an advanced etcher/asher used in a variety of industries for a wide range of applications. The equipment is capable of etching and/or ashing a variety of materials at a high level of precision with great accuracy. It is designed to be an integrated, robust, and cost-effective solution. The system is capable of etching and ashing up to four wafers at a time. It has four linear axes for precise control and alignment of the chuck, substrate, and nozzle movement. The unit is equipped with an RF generator to deliver precise levels of power to the substrates for accurate and repeatable etching and ashing processes. Also included is a pumping station for easy vacuum level control and a nitrogen purge machine, allowing for atmosphere control in the etching chamber. Its multi-chamber design enables various methods of surface treatment, with the first chamber for removing contaminants, the second for high-energy treatments, and the third for rapid cooling rates. Furthermore, its load lock tool enables quick loading and unloading of substrates and semiconductor wafers without breaking the vacuum of the process chamber. SEZ SP 201 offers advanced performance for its price and includes features such as 12-bit resolution, precision motor control, auto-alignment of the nozzle, and the ability to work with both 5000 and 6000W RF generators. It is also equipped with a wide range of accessories to suit any etching or ashing process. The asset has a very low vacuum leak rate, ensuring a uniform process and clean end-products. Furthermore, the model utilizes advanced safety features such as multiple safety interlocks, chamber interlocks, and primary and secondary exhaust systems. This ensures that the equipment is safe and reliable during all stages of operation. LAM RESEARCH SP201 is an ideal solution for those requiring precise etching and ashing processes. It is designed to provide excellent results and a cost-effective price point. It is a highly advanced etcher/asher that can enhance any etching and ashing process and is an excellent choice for any industrial application.