Used SEZ / LAM RESEARCH SP 203 #9207192 for sale

SEZ / LAM RESEARCH SP 203 is a fully automated plasma etcher / asher, designed for research and development purposes. It makes use of the latest in technology to produce high quality results. SEZ SP 203 features an integrated vacuum isolation equipment for maximum process control, as well as a set of automated controls for reliable operation, and process recipe control parameters. LAM RESEARCH SP 203 has three independent contactless electrode systems, enabling independent control of the gas, power, and bias to modify the plasma properties. It has a maximum working pressure of 600mTorr and operating pressure range of 0.15 - 110mTorr, making it suitable for a variety of process gases, such as NF3, CHF3, NH3, AR, and CBr4. Additionally, it features an optimized arc discharge source for uniform plasma focus and confidence. SP 203 also features a host of other features for convenience and reliability, such as a substrate surface temperature monitoring system, a built-in shutter to block the incoming beam during an etch, and a robust cooling unit for sample temperature control. It has an integrated secondary isolation chamber that can be used to produce high precision, highly controlled etch and etch/stripping processes by eliminating cross-contamination between samples. To ensure quality etching, SEZ / LAM RESEARCH SP 203 features a comprehensive electrical grounding machine, optical emissions monitoring to ensure uniformity of the output, as well as an RF blanking tool. To maintain process integrity, SEZ SP 203 comes with a variety of recipe control functions and advanced safety features. For convenience, it has a graphical user interface, which allows for easy programming and configuration of the asset. In conclusion, LAM RESEARCH SP 203 is a highly advanced and reliable etcher / asher that features the latest in technological advancements. Its wide range of features enables it to produce high quality results with reliability, convenience, and process integrity.