Used SEZ / LAM RESEARCH SP 203 #9217507 for sale
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ID: 9217507
Spin etcher, 8"
(2) Shutter door load ports
Open cassette with manual cassette loading
Standard wafer handling with wafer backside and front side operation
ATM407 Robot handling with CYBEROPTICS laser mapper
Vacuum ceramic end effector single sided
(2) ECO Grippers for wafer transfer
Standard pin chuck 200/200/200
DIW Rinse arm
N2 Dry arm
Medium dispenser arm
Single HEX heater
Heat exchanger
USF100 Ultrasonic flow meter (Chemical flow meter)
Chemical cabinet (CDS)
Integrated PDB
Shutter load port open / Close motor controller missing
Power: 208 VAC, 3 Phase, 50/60 Hz, 60 A
2010 vintage.
SEZ / LAM RESEARCH SP 203 is an advanced etcher/ asher machine with state-of-the-art automated features and a powerful ability to clean surfaces quickly and efficiently. It is designed for dependable, secure operation in a wide variety of industrial processes. This machine is ideal for companies that require frequent deep cleaning of hard surfaces with minimum downtime and maintenance downtime. SEZ SP 203 offers highly precise automated control to help process a variety of materials including metals, plastics, coatings, dielectric materials, and glass. It is equipped with a powerful dual-frequency LCD panel for precise control of temperature settings as well as featuring a built-in fan to keep the temperature inside the chamber controlled and consistent. Furthermore, it is equipped with a self-diagnostic system that alerts the user when the machine's performance begins to falter, allowing repair and maintenance personnel to be given accurate information as quickly as possible. LAM RESEARCH SP 203 is also equipped with an integrated exhaust system for removing waste materials from the chamber atmosphere, allowing for safe and efficient processing. The built-in safety features, such as safety shutoffs and an insulated containment collar, further ensure that the user is protected during operation. And for operations that require uniform results, SP 203 is equipped with a Programmable Logic Controller (PLC) system, enabling a variety of programmable parameters to be stored, edited and executed quickly. The machine is also configurable to accommodate different substrate and chamber sizes, allowing users to work with a range of structural materials. In conclusion, SEZ / LAM RESEARCH SP 203 offers cutting-edge automated features and top-notch safety features to provide top-quality etching and ashing operations with dependable and reliable performance. With its robust construction, consistent temperatures, and configurable function, SEZ SP 203 is capable of achieving uniform results without sacrificing efficiency or power.
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