Used SEZ / LAM RESEARCH SP 203 #9407543 for sale
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ID: 9407543
Wafer Size: 8"
Spin etcher, 8"
Front UI
ULPA Filter
Ionizer system
(2) Load ports (Left and Right): 8
Load-port adapters: 8
Chuck Size (Left and Right): 8"
Chemical module1: DI
SMIF Non-functional
Power Distribution Box (PDB)
Cables
Does not include:
Rear UI
Flip module
End point detection system
HORIBA Concentration monitor (HF Monitor)
(2) Heat exchangers
Wafer ID Reader
RFID Reader
AGV
Ozone module
Transformer.
SEZ / LAM RESEARCH SP 203 is a high precision etcher / asher equipment. It is part of SEZ/LAM's Research Series and is designed to meet the exacting standards required for advanced research and development applications. SEZ SP 203 has been developed with a highly versatile, multi-purpose system that enables complete control over the etching and ashing processes. The unit has a choice of four etch or ash configurations with a variety of delivery and gas inlet systems. It is able to etch or ash with a range of materials and substrates, single or multiple layers, parallel or perpendicular surfaces, and with many different thicknesses. LAM RESEARCH SP 203 has a wide range of control options, including an accurate digital readout, which can be used to set the desired parameters for etching or ashing. It has an independent gas gauge for controlling gas flow rate and pressure, as well as an adjustable temperature setting for controlling etch rate, substrate temperature, and surface cleanliness. SP 203 utilizes a PC-based software for programming individual etch or ash processes and creating cycle recipes. The software features an intuitive graphical interface for setting up processes, with easy to use menus and controls for easy operation. SEZ / LAM RESEARCH SP 203 also features a built-in safety and monitoring machine to ensure optimal conditions during the etching or ashing process. It uses advanced sensing technology to detect any potential hazardous events and automatically switch off the etching/ashing operation. It also has an alarm tool with allowing real-time monitoring of the etch/ash process. SEZ SP 203 has a user-friendly design with high performance in mind. Its advanced design ensures accuracy, repeatability, and reliability in all etch or ash processes. Its high quality parts provide superior performance and reliability, while offering long-term durability. Overall, LAM RESEARCH SP 203 is an innovative and versatile solution for etching and ashing applications. Its advanced features and design make it an ideal choice for research, development, and production purposes. SP 203 offers high precision, accuracy, and repeatability, making it an ideal tool for any laboratory or production environment.
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