Used SEZ / LAM RESEARCH SP 223 #293655016 for sale

SEZ / LAM RESEARCH SP 223 is a sophisticated etcher/asher used in the electronics industry for the etching and ashing of high resolution photolithography masks and wafers. It is a parallel batch processing equipment capable of processing up to four wafers simultaneously. SEZ SP 223 has an active/inactive switch that allows the user to switch between processes. The etcher/asher has two chamberse, each with its own plasma source, gas delivery system and etch/ash chamber. The chambers are connected to a plasma processor, which controls the pressure, gas flow, RF generator frequency, and other parameters of the process. The process parameters are derived from predefined recipes, stored in the unit's memory. LAM RESEARCH SP 223 machine is designed to etch/ash photomasks to a resolution of less than 1 micron. High resolutions are achieved by the tool's active chamber control asset, which maintains a precisely controlled environment and ensures accurate etching/ashing. In addition, the model offers two distinct recipes that can be used to etch/ash a single mask in one process. The equipment also has built-in safeguards designed to minimize etch/ash damage. The system's plasma shields, low-volume delivery unit and accident prevention machine are designed to protect the mask or wafer being processed from over-etching, exposure to hydrogen or other damaging agents, and other potentially hazardous risks. SP 223 is a robust, reliable etcher/asher that offers precise control and high performance at an affordable cost. It is the perfect choice for anyone who needs a consistent way to process their photolithography masks and wafers accurately and quickly.