Used SEZ / LAM RESEARCH SP 223 #293775027 for sale

SEZ / LAM RESEARCH SP 223 is an etcher/asher that combines high-end engineering and innovative technologies to best meet the demands of wafer applications. SEZ SP 223 is a flexible, full-range equipment that features process modules that provide advanced primate and system control functions. The unit is fully configurable from 8 up to 30 inches processing area with up to 200 mm for uniformity distribution, 8 precision motorized stages, and 600 mm drive capacity. This makes it suitable for larger wafers and PDKs as well as simple masks and substrates. LAM RESEARCH SP 223 is equipped with various process modules tailored for a variety of etching/asher applications. The RIE module offers precise control of reactants and gases, supplying uniform etch feature over wide wafer applications. Hot plasma RIE allows very large range of gas chemistry mixing, making it suitable for more complex materials including nitrides, oxides, and polymers. The advanced PDL module includes a feature set tailored for ultra-low plasma damage, even in low-temperature or low-vacuum array processes. The fast wafer features also enable optimized throughputs. The machine also features robust process tools for automated wafer mapping. The advanced wafer map enables optimizing uniformity with automatic feedback control systems. The tool also offers best-in-class wafer cleanliness for highest yields and reliability. The recipe-driven interface offers real-time process development tools, such as the Process Generator for interactive designing, programming, and loading processes. SP 223 also includes an integrated real-time detection asset designed for monitoring the entire process. SEZ / LAM RESEARCH SP 223 is equipped with an integrated chamber design that minimizes particle and molecular contamination. The high vacuum and the premium turbomolecular pumps provide ultimate process control. The package also includes advance high-performance gas cabinets capable of achieving unparalleled gas-flow conditions for easy process integration. Overall, SEZ SP 223 is an etcher/asher that combines the latest precision motorized stages, advanced primate and model control functions, best-in-class wafer cleanliness, and cutting-edge automation technologies. It is suitable for a wide range of etching/asher applications and is ideal for those looking for high-precision control and repeatable process performance.