Used SEZ / LAM RESEARCH SP 304 #9093794 for sale

SEZ / LAM RESEARCH SP 304 etcher / asher equipment is a tool used for the etching and ashing of substrate materials for the semiconductor fabrication process. It is capable of performing a variety of process steps, such as wet etching, dry etching, photoresist stripping, and resist strip etching. The system features two independent process modules, each with its own independent control unit. The first module is an etching station, which is used for the etching of the substrate materials. It features programmable etching processes, such as reactive ion etching, plasma etching, and dry etching. The etching station is also capable of performing cleaning and selectivity steps, such as oxide dipping, photoresist stripping, and resist strip etching. The second module is an ashing station. It is used for the removal of photoresists, polyimides, and other organic materials from the substrate material. This feature enables maskless lithography processes to be accomplished very quickly. Both of the process modules are designed for maximum throughput and flexibility. They feature advanced process control systems which ensure precise temperature and power control. Additionally, each module is equipped with a fast-flushing capability, allowing for rapid full-field etching and ashing. Besides, the two modules feature an integrated endpoint detection machine, which can detect the end of any etching or ashing step and adjust the process accordingly. SEZ SP 304 is a robust tool that operates in a safe and reliable manner, with a minimum of user maintenance required. The asset is compliant to safety and environmental standards, such as IS09001 and SEMI S2. The model's low cost and compact design make it an ideal choice for both established and emerging fabs. LAM RESEARCH SP 304 etcher / asher is a highly versatile equipment, capable of performing numerous process steps. It gives manufacturers the ability to etch and ash with excellent yields, while also providing consistent and reliable results. It is a cost-effective and efficient tool which ensures quality in the semiconductor fabrication process.