Used SEZ / LAM RESEARCH SP 304 #9397342 for sale

SEZ / LAM RESEARCH SP 304 is an etcher / asher specifically developed for the electronics industry. It is a wide chamber process tool capable of etching and cleaning a variety of materials. This multi-chamber, multi-process etcher / asher features state-of-the-art process control and performance, making it a reliable and robust tool for any production environment. SEZ SP 304 is equipped with four integrated chambers: etch, clean, strip, and rinse. The etch chamber is designed to provide superior performance while maintaining repeatable process control. It is fitted with a high-performance ion source, allowing for a wide range of process parameters to be easily adjusted. The clean chamber utilizes magnetically assisted pulsed plasma cleaning to maximize process control and enable rapid cycle times. The strip chamber is designed to provide fast and efficient removal of unwanted layers of material, while the rinse chamber is designed to provide a final rinse before the substrate is removed from the machine. LAM RESEARCH SP 304's advanced controlling system allows for automation of all process parameters, as well as customization of recipes for specific process requirements. The system is further enhanced by integrated process monitoring, allowing for continuous monitoring of all process parameters for greater assurance of repeatability and quality. SP 304 has a large capacity process chamber that is capable of handling a wide range of substrate sizes. It can also be equipped with a variety of lifting mechanisms to enable handling of various sizes and shapes. Along with its comprehensive controls and advanced technology, SEZ / LAM RESEARCH SP 304 is designed to ensure defect-free results with minimal scrap and downtime. SEZ SP 304 provides true unmatched performance, quality and throughput in a reliable, robust and cost-effective platform. It is the perfect solution for the electronics industry looking for low-cost, reliable and high-performance etching for a variety of materials.