Used SEZ / LAM RESEARCH SP 323 #293824790 for sale
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SEZ / LAM RESEARCH SP 323 is an etcher/asher designed for a wide range of material etching and ashing applications. This equipment is optimized for high throughput and is suitable for fast turn-around applications. This system can process wafers of various sizes and materials with a 12 inch multi-chamber process chamber. SEZ SP 323 is built with the latest technology and features SEZ patented Multi-Reactor Technology TM, which allows delivery of different etching and ashing chemistries in one chamber. It is further designed with state-of-the-art RF and DC plasma sources to ensure uniform and reproducible process results across wafer-to-wafer and chamber-to-chamber. This unit provides precision control with a high level of repeatability for wafer batch applications. LAM RESEARCH SP323 also offers a wide range of process support features such as pressure monitoring, temperature control, humidity monitoring, particle filtration, and vapor delivery. The machine also provides a platform for user-configurable process parameters and integration of RF wafer mapping solutions. This enables precise control of process parameters across the various chambers, giving process engineers greater freedom to build recipe and maintain process consistency batch after batch. SP323 is designed with a comprehensive user interface, with an intuitive graphical interface and database connectivity, allowing users to easily customize recipes and process parameters. This tool also offers flexible remote process monitoring and control, including real-time data access and reporting capabilities. Overall, SEZ / LAM RESEARCH SP323 is an ideal etcher/asher solution for a wide range of material etching and ashing applications. It offers advanced process parameters control, precise repeatable, process results, wide process support, and intuitive user interface, making it highly suitable for fast-turnaround, complex fabrication processes.
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