Used SEZ / LAM RESEARCH SP 323 #9329269 for sale

SEZ / LAM RESEARCH SP 323 is an etcher/asher, designed for low-pressure plasma etching and ashing. It is a vacuum chamber tool fitted with special process features, which are ideal for a variety of applications requiring precise control over process parameters and materials. SEZ SP 323 allows users to etch and ashers at lower temperatures than traditional plasma methods and to achieve cleaner surfaces. It incorporates several process innovations in its design, making it one of the most advanced etchers and ashers available today. LAM RESEARCH SP323 is an upright, fully automated equipment. It has a maximum load capacity of 2.5 Kg and features an integrated load lock chamber. Its plasma processes are engineered to provide a higher degree of process uniformity and reproducibility than conventional plasma etching and ashing methods. The system is equipped with a three-zone thermal control unit, allowing for precise temperature control of the chamber, chamber walls, and plasma chamber. This allows users to repeat their processes more accurately, over time. LAM RESEARCH SP 323 is designed for high flexibility, with a wide range of process parameters and material types that it can accommodate. It has an active process monitoring machine, which provides users with real-time feedback on plasma process parameters and allows them to make adjustments on the fly. The tool features an active cooling asset, allowing for extended run times without degrading the chamber environment. It is constructed from materials designed to withstand harsh plasma processing environments, minimizing downtime. In addition, SEZ SP323 is highly customizable and can be configured to meet a variety of customer requirements. It can be integrated into existing operations, including robotics and automation systems. The model includes a powerful and user-friendly software package, which allows for easy setup and control. The software allows for the active monitoring of process parameters as well as data logging for detailed analysis. SEZ / LAM RESEARCH SP323 is a powerful and versatile etcher/asher equipment. It is designed with several advanced process innovations, making it one of the most flexible systems currently available. Its low-pressure plasma etching and ashing capabilities make it ideal for a variety of applications, while its active cooling system allows for extended run times without damaging the chamber. Its integrated software unit provides precise control over process parameters and materials, and its customizable design enables it to meet a variety of customer needs.