Used SEZ / LAM RESEARCH SP 323 #9366266 for sale

SEZ / LAM RESEARCH SP 323 is an etcher / asher designed for use in semiconductor and FPD (Flat Panel Display) production. It offers automated performance for a variety of etch and strip-stripping chemistries. This versatile equipment has an advanced system integration, high-level process control and multi-level automation. SEZ SP 323 features a small footprint, making it easy to integrate into existing production lines. Its modular design ensures fast exchange of components resulting in disassembly and assembly times of less than 15 minutes. The unit has a two-zone Split-Zone Reflexion and Impingement. This allow for increased substrate and process uniformity for varying die and module sizes, processes and temperatures. The machine boasts high-speed, large chamber-to-chamber transport capabilities. This allows for up to 44 modules per batch process in any recipe combination and can accommodate up to four active modules per IC (integrated circuit). Additionally, LAM RESEARCH SP323 features three-dimensional plasma impedance control with an adjustable, high-frequency power generator. In addition, SP323 includes an advanced software package to provide more precise control over each batch run. This includes a powerful, flexible recipe editor and data analysis software package that allows for full remote control and monitoring of the etch process. The package also allows for parameter tuning and fine-tuning capabilities, which allow for optimization of the etching process. Finally, SEZ SP323 offers enhanced safety features including automatic temperature monitoring, a built-in safety-locking tool and an optional Class I, Division II, certified hazardous location cabinet. This makes the asset ideal for any hazardous environment. In summary, SP 323 is an etcher / asher designed for semiconductor, FPD and other production lines. It features a small footprint, modular design, high-speed transport capabilities and advanced software package for optimized etching. Furthermore, it boasts enhanced safety features, making it ideal for hazardous environments.