Used SEZ / LAM RESEARCH SP 4300 #9276828 for sale

SEZ / LAM RESEARCH SP 4300
ID: 9276828
Wafer Size: 12"
Etcher, 12" (4) Chambers.
SEZ / LAM RESEARCH SP 4300 is an advanced, automated etcher/asher that is designed for precise and efficient etching and ashing requirements in semiconductor and optoelectronic device fabrication. It utilizes a three zone diffusion powered oxygen plasma source to provide a significantly greater etching/ashing efficiency. Furthermore, the equipment is capable of providing an adjustable concentration of reactive species, allowing greater control over the etching/ashing operation and end result. The system is composed of an Asher/Etcher module, a network controller, and a variety of components, such as a vacuum chamber, a draw bar, a spray-on reagent management unit, an interface card, power supplies, and a vacuum pump. The Asher/Etcher module is responsible for providing the plasma by using an oxygen plasma source with diffusion and dissociative powers. To operate SEZ SP 4300, the vacuum chamber is filled with desired gas, such asargon, xenon, or oxygen. The reactive ionized gas then enters the chamber, where it encounters a proprietary RF power amplifier after which the plasma is introduced. This plasma creates a homogenous field that is evenly distributed throughout the chamber, allowing for precise etching and ashing operations. The network controller provides the user interface and software for controlling the etching and ashing operations. LAM RESEARCH SP 4300 is capable of producing both dry etching and wet etching procedures, as well as chemical and gas processes, depending on the operation requirements. Additionally, it features a four-stage gas delivery machine that allows for repeatable and precise adjustment of the desired process concentrations. Furthermore, the tool boasts a wide range of available adjustable operational parameters, allowing for a great degree of flexibility. In conclusion, SP 4300 is a powerful, ergonomic and efficient etcher/asher that is designed for the precise and effective automated etching and ashing operations of semiconductor and optoelectronic fabrication. With its wide range of adjustability and flexibility, SEZ / LAM RESEARCH SP 4300 offers a great deal of precision and control in etching and ashing, making it an ideal solution for any etching/ashing requirement.
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