Used SEZ / LAM RESEARCH SP 4300 #9397344 for sale

SEZ / LAM RESEARCH SP 4300 is an etcher/asher used for processing a variety of materials in the semiconductor industry. It is designed for high throughput, enabling advanced technology processes in the most demanding applications. Featuring a large processing chamber and a multi-tool configuration, SEZ SP 4300 is a versatile platform for an array of etching and ashing processes. LAM RESEARCH SP 4300 provides precise control of surface processing with its advanced precision plasma control systems, which includes with a variety of RF RF/DC configurations. Its uniformity and total wafer coverage is enhanced with a unique, multi-pon port inductively coupled plasma (ICP) source. Its innovative automated end point control and sophisticated closed-loop power control systems ensure accurate process results, even when processing with volatile materials or other difficult-to-etch materials. SP 4300 features an auto-load/unload process chamber, which ensures consistent, high throughput and can handle large-sized wafers up to 8 inch in diameter. The auto-load/unload lid closed system prevents contamination and keeps fields on the wafer clean and uniform. A heated substrate and sample chuck, coupled with advanced process control systems, allows for reliable process and temperature control. SEZ / LAM RESEARCH SP 4300 is also designed for easy maintenance with removable chambers and sub-assemblies for easy cleaning and replacement. SEZ SP 4300 comes with a range of options, including an integrated Robotic Wafer Handlers for robotic wafer transfers and a Work Chamber Safety System to protect both personnel and machines by monitoring the atmospheric conditions. With its comprehensive process control systems, large processing chamber, and range of options, LAM RESEARCH SP 4300 is an ideal tool for the most advanced etching and ashing processes.