Used SEZ / LAM RESEARCH Spare parts for RST 101 #9268917 for sale

Qty / Part number / Description (2) / 2000615-00 / Sensor pressure switches, ISE2 (2) / 2001874-00 / Amplifiers, AC motor, MCOM-DC-AMP-plus (1) / 2002607-00 / Bearing unit, COLUMBUS Stepper motor (1) / 2002974-00 / Base 6" left (Pick and place) (3) / 2005374-00 / Covers for vacuum channel, 6", short for fork (2) / 832-125216-001 / AC servo motors, M863-8/20 (1) / 2007004-00 / 6" Chuck with N2 hole, 6-pin, PETP cover (4) / 2012858-00 / Tube carrier-inserts 1/2" for 1 HEX (2) / RB000004-00 / Spindles for linear table (4) / RB000005-00 / Linear guides for linear table (2) / 2004990-00 / Boards, processor MCOM I1Xa (2) / 2004994-00 / AB1-MCOM-Z80-00051 - Z80 (4) / 2000599-00 / Pressure springs, VD-052G A2 (1) / 2015432-00 / Motor DC 3557, Gear 5/1, Enc, Linedrv (2) / 2013555-00 / Sensor exhausts SIGMAMELTEC hPa (1) / 200656-00 / Encoder HG608KR (1) / - / Encoder DGS65 (2) / 2003019-01 / Block brakes (2) / - / Return tubes for chamber, Med2, Med3 (1) / - / Power supply, 24 V, 27 A (1) / 2001654-00 / Power supply unit, 36 V, 8 A (2) / 2004008-00 / Stepper motors P430-A14 (1) / - / Power supply, 12 V, 5 V, 5 V, 13 V (6) / - / Pressure measurements, Mpa (6) / - / Switches, EMO (3) / 2010013-00 / Control board stepper motors, EDM-453 (2) / EB2-RST-VSPAP-INT3 / Front side pick and place (2) / 2000522-00 / Cards, DIGI PC/4E 4x Serial quad DB-25 (3) / 2001578-00 / Cards, motion control, variable PWM frequency (1) / 2001036-00 / Card, input 1.0, 2.0 for chemistry system (4) / 2004025-00 / Controllers, stepper motor, 1.0 A (6) / 2000504-00 / Control board stepper motors, 30 V, 2 A (5) / - / HEDS5120-A11 Encoder discs (3) / 2000507-00 / Cards, DC driver, 16 out, 50 V, 1 A (3) / 2004991-00 / Z80-Processor interface (1) / - / Electronic card (1) / 2005589-00 / Card, Optocoupler interface, 16" / 4+4 Out.