Used SEZ SP 201 #293821357 for sale

SEZ SP 201 is an etcher / asher manufactured by SEZ Group. It is an ideal machine for etching and ashing both small- and medium-sized wafers and substrates in the semiconductor and automotive industries. The machine has a compact size and is easy to use thanks to the intuitive graphical user interface. SP 201 has a dimension of 1000 x 600 mm and operates in the temperature range of 20°C to 350°C. It has a maximum process area of 17 x 17 mm. The machine is capable of a maximum etching speed of 70 millimeters per second and a minimum etching speed of 5 millimeters per second. It is also capable of handling a maximum substrate size of 250 x 250 mm. The machine is powered by four brushless motors and is equipped with a loadlock chamber, pressure sensor, and integrated gas delivery equipment. It also comes with a built-in pressure control, real time O 2 and CO 2 measurement, and an O 2 supply from a dedicated generator. SEZ SP 201 is equipped with a PC-based software control system and an industrial communication interface. It also includes an advanced ROS quality control and wafer yield optimization unit. The machine performs short cycle operation and temperature controlled critical etching. It also features precise positioning and steady process control, as well as advanced inspection tools. Additionally, the advanced safety features of SP 201 enable it to protect the process environment. It includes an active thermal sensor, an air purifier with an air shutter feature, and exhaust fan systems. The machine has an open platform with the ability to integrate process tools such as an automated vision machine. Overall, SEZ SP 201 is a reliable and cost-effective etcher / asher for the semiconductor and automotive industries. It provides precise control of the etching process with advanced safety features, as well as optimized long-term etching performance and process reliability.