Used SHIBAURA µASH 8100 #9234384 for sale

Manufacturer
SHIBAURA
Model
µASH 8100
ID: 9234384
Wafer Size: 8"
System, 8" (2) Chambers Processing type: Vacuum Mass flow controller (MFC): Gas number / Gas name / MFC Size (SCCM) Gas 1 / O2 / 2000 Gas 2 / O2 / 2000 Gas 3 / CF4 / 20 Gas 4 / CF4 / 20 Gauge: MKS Baratron 626A Range: 1.333 kPa NS FFU-222 System DAIHEN CMC-10 Tuning control DAIHEN SGP-10B RF Generator DAIHEN SGM-10A Matcher.
SHIBAURA µASH 8100 is an etcher/asher designed to provide precise and intricate etching and ashing on a variety of substrates. It integrates laser source, beam control technology, and uniquely designed process management software to deliver highly accurate results. This etcher/asher can automatically adjust to simulate different etching conditions for different materials, from soft metals to hard ceramic substrates. The unit adopts the advanced sealed-off laser source which provides a stable and controllable process. It is designed to offer complete control over the laser parameters such as pulse duration, energy levels, frequency, and beam spot size. The process management software allows control over each element of the process, ensuring safety and accuracy. It delivers uniformly etched depths and particle-free surfaces with each application. The etching process can be carried out on both flat and contoured surfaces. The unique solid-state laser setting enables high-quality finish on curved, intricate and non-flat surfaces. It can operate over a wide range of temperatures, allowing the user to reduce the etching time while ensuring high-precision results. The etching process is versatile and can be applied to nearly any substrate. The etcher/asher offers robust construction quality and features an IP54 dustproof/splashproof construction. Its integral laser system and closed-loop cooling channel ensures a long and reliable performance. To prevent any overheating, the etcher/asher has a low-energy-density design and a temperature detection system that shuts the machine down if the temperature becomes too high. ΜASH 8100 offers superior precision to ensure the most intricate patterns and designs are formed with ease and accuracy. This etcher/asher is designed for reliability and ease of use, and is ideal for users working with a wide variety of substrates. With its automated features and robust construction quality, SHIBAURA µASH 8100 offers the perfect solution for etching and ashing applications.
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