Used SHIBAURA BM-1400PC #190674 for sale
URL successfully copied!
Tap to zoom
ID: 190674
Wafer Size: 8"
Photo Catalyst (Hydrophilic Mirror) Sputtering System, 8"
Specifications:
Single-wafer load lock
Supports wafers up to a maximum of 8"
(5) processing chambers (Sio2: 2 layer, Tio2: 2 layer
Inverse sputtering with our original cup gun method
Heating unit included
Wafer size is 265 mm, Effective real coating diameter is 248 mm
Coating uniformity: ±4%
Vacuum pump: TMP (Turbo Molecular Pump) and Rotary Pump
Mass flow control: MFC and Flow check
Main configuration:
Sputter Chamber: SiO2 + TiO2 + Sio2 (Total working chambers: 6)
Heating Chamber, Loading, unloading, Control panel, Utility Gauge, Panel, Emergency Button
Sputtering chamber configuration:
Cooling Plate
Magnet
Target: Reactive magnetron, Oxygen
Sputter Chamber
Heating chamber configuration:
IR lamp heater
Upper and lower heater
Control panel:
Main breaker
Emergency SW
Interlock release Plug
Vacuum gauge
Pirani Gauge (1, 2, 3; H, M, Low vacuum check)
Bourdons Vacuum Gauge
Pulse generator:
Power Supply: DC: 16 ea
Power Breaker: 16 pcs.
SHIBAURA BM-1400PC is a high-precision etcher of materials such as glass, metal, and plastic, designed to meet the needs of the largest and most complex projects. BM-1400PC has a unique high-precision patterning capability that works perfectly for the most particular of detail jobs. It features modern components, built-in software, sensors, and automation. Coupled with accurate workflow management functions, SHIBAURA BM-1400PC is an unbeatable solution for creating unique and intricate patterns. BM-1400PC is constructed with a robust gold plated substrate, which is connected to advanced wafer processing systems. The reaction chamber is extremely stable and provides a very consistent environment all throughout the processing cycle, which further improves etching accuracy. Its advanced temperature and flow control systems provide consistent results that can meet the requirements of both low- and high-heat applications. Its air-cooled substrate, along with its automation and software, allows for less chemistry and higher quality etching. SHIBAURA BM-1400PC is compatible with a large range of chemical etchants, and it is able to regulate parameters including etchant concentration, fluid flow rate, temperature and pH. It also has designed-in safety systems, ensuring maximum safety during the etching process. The machine also offers highly-efficient workflow scheduling, idle time and resource management, as well as data collection and analysis. Furthermore, BM-1400PC is able to perform RIE (reactive ion etching) and support a wide selection of gases for different etching results such as for deposition, etching, power supplies, gases, and so on. The machine has a full-coloured 10.4" LCD display as well as offering a number of accessories including stainless steel cabinets, cooling analysis systems, and other components. Overall, SHIBAURA BM-1400PC is a robust, advanced etcher and asher that is ideal for creating intricate patterns on a variety of materials. It is capable of providing precise and reliable results, helping to ensure that projects are completed to the highest standard possible.
There are no reviews yet