Used SHIBAURA CDE 7-3A #9226075 for sale

SHIBAURA CDE 7-3A
Manufacturer
SHIBAURA
Model
CDE 7-3A
ID: 9226075
Wafer Size: 6"
Vintage: 1989
Etcher, 6" 1989 vintage.
SHIBAURA CDE 7-3A is an etching and ashing equipment that is highly reliable and versatile. It offers reliable and efficient etching and ashing in order to improve the quality and yield of device microfabrication. This system can handle multiple layers of materials up to 25 microns thick. It is equipped with two pixel mapping technologies, fast scan spot 1 micro-fabrication and fast scan spot 2 high precision patterning. CDE 7-3A is an easy-to-use unit that offers single- setup, a process that substantially increases productivity. The machine is equipped with an auto-drive feature that enables automated sequential etching and ashing when process steps are repeated. Moreover, it offers a user selectable feature which is beneficial to the user allowing them to select the most effective parameters for each layer. SHIBAURA CDE 7-3A is also equipped with a touchscreen color monitor, which displays the process steps and parameters. This user-friendly feature helps to simplify setup and control operations for a range of etching and ashing processes. Furthermore, an auto-feeder for etched substrates is included, which allows for high quality and throughput. In terms of power requirements, CDE 7-3A is equipped with a three phase power supply that uses AC or DC voltages. The tool utilizes a direct drive microwave plasma source for etching and a high voltage DC plasma source for the ashing process. This combination of power sources yields a high etching precision that is independent of the substrate material and layer thickness. SHIBAURA CDE 7-3A is a reliable etching and ashing asset that is ideal for the production of high quality devices. It is equipped with advanced features to make the etching and ashing process highly efficient, and it offers a range of power sources to ensure the highest precision and accuracy. Furthermore, the touchscreen monitor enables simple setup and control operations while the auto-feeder ensures high quality with a high level of throughput.
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