Used SHIBAURA CDE 7-3A #9226076 for sale

SHIBAURA CDE 7-3A is an etcher/asher designed for reactive ion etching (RIE) and plasma ashing applications. This unit is equipped with a 12" diameter turbo pump, providing a maximum etching/ashing rate of 100nm/min. It is also equipped with a low noise RF power source, which supplies between 1 to 600 W of power at 13.56MHz frequency. Moreover, CDE 7-3A features a vacuum chamber with an inner space that measures 11 Inch-L x 7.5 Inch-W x 7.5 Inch-H and the unit is able to operate within a vacuum environment of 10-4 Pa. The unit includes a gas dosing and supply system, which allows for accurate control of the reaction conditions. The combination of the low noise RF power source, gas dosing and supply system, and turbo pump allows for precision etching and ashing. SHIBAURA CDE 7-3A also has a variable pressure sensor, granular shield, and range of heating elements, which can be used to select the optimum pressure, suppress secondary reactions, and achieve high temperatures, respectively. In addition, the unit possesses a memory that stores recipes and process conditions. The etcher/asher also benefits from an intuitive LCD touch screen, which is used to control the processing parameters in addition to the recipe memory. Overall, CDE 7-3A provides a reliable platform for etching and ashing materials with a maximum etching/ashing rate of 100nm/min and a maximum operating pressure of 10-4 Pa.