Used SHIBAURA CDE-73 #9137189 for sale

SHIBAURA CDE-73 etcher / asher is a high-performance, comprehensive, automated wet etch equipment designed for use in semiconductor, MEMS, and biomedical industries. This etching system offers high uniformity, precision, and reliability. The unit is constructed from stainless-steel and can be used for any etching process, including SiO2, polysilicon, metals, nitrides, and SiO2 / Poly stacks. It features a heat exchanger, gas handling machine, and a process station. The high-performance heat exchanger offers rapid thermal response and greater temperature control accuracy, allowing for precise etching. The gas-handling tool includes a helium safety relief valve, metal autotaps, quench, and exhaust valves. The process station is equipped with nine process vessel ports that allow for up to eight process vessels to be used simultaneously. With its 3-4 liter capacity process tanks, CDE-73 offers a wide range of process parameters, such as pressure, temperature, gas flowrate, and etch rate. The asset also offers greater process control and stability with the innovative cold-gas quench model, which helps to reduce bubbles. SHIBAURA CDE-73 is well-equipped with safety features, including an adjustable lid, a control panel guard, and a sound-dampening device. It also features an integrated exhaust equipment and gas-flow detector, which helps to monitor the cleaning process and alert operators when pressure or gas flowrate levels are abnormal. All of these features come together to create a cutting-edge etching system, providing users with accurate etching capabilities, improved safety, and high uniformity. This user-friendly etching unit can help users quickly and easily produce quality wafers with minimal downtime. The reliability, accuracy, and precision of CDE-73 makes it an excellent choice for etching needs.