Used SHIBAURA CDE 80 #293609517 for sale
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ID: 293609517
Vintage: 1995
Etcher
SMIF Loader
Controller
CRT
Keyboard
SUS Front panel
Ni coated Al Side panel
Pump interface
Quartz tube protection
ESC Universal chuck
Water auxiliaries, 8"
Gas system:
(5) TYLAN FC-2900 Mass Flow Controllers (MFC)
Gases: CF4, C12, N2, 02, NF3
Does not include dry pump
1995 vintage.
SHIBAURA CDE 80 is an etcher / asher specifically designed to process samples in various applications, including lithography, electrodeposition, etching, ashing, and other techniques. This tool has one of the largest etching chambers, providing superior sample processing and more capabilities compared to more traditional etching solutions. SHIBAURA CDE-80 features a dual chamber enclosure, top and bottom. The top chamber is designed for substrate loading and unloading, and the bottom chamber is used for ashing and etching. The size of the substrate can vary from small pieces to larger, higher quality samples. The walls of the chamber are made of durable stainless steel and are able to resist all types of corrosive and abrasive damage, ensuring top quality results. CDE 80 utilizes a high-frequency magnetron RF power source to be able to maximize the accuracy and precision of the etching process. The equipment also has a proprietary thermal management system to ensure all the etching and ashing parameters, such as temperature and pressure, are successfully maintained for optimal etching results. It also features several utilizable functions and portability as well. For example, it is capable of controlling the etching process from the computer unit, which allows for optimal control accuracy. Furthermore, it features optional temperature and pressure readouts, as well as multiple safety features, such as airtight seals and over current limiters. CDE-80 also has a vacuum pump and a maintenance free design, allowing for maximum reliability. On top of that, it ships with software that helps users design and monitor their etching and ashing parameters, ensuring their processes remain optimized. Overall, SHIBAURA CDE 80 is a highly versatile etcher / asher that offers reliable, accurate and precise outcomes in a wide variety of applications. As this machine can handle a variety of different sample sizes, it is especially well suited for researchers or manufacturing professionals looking for flexible etching solutions.
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