Used SHIBAURA CDE 80 #9243622 for sale
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ID: 9243622
Wafer Size: 8"
Vintage: 1996
Isotropic poly etcher, 8"
Install type: Stand-alone
Etching method: Microwave-utilized chemical dry etch
Cassette interface:
SMIF Ready
Does not include load-port
25 Wafer cassettes
Etching chamber:
Single wafer etching
Microwave PS:
DAIHEN SGP-10B
2.45 GHz, 1kW
Pressure control (Std conductance valve control):
MKS 627AA
Gas:
Gas # Gas MFC size (SCCM)
1 O2 500
2 CF4 500
3 N2 200
4 CF4 100
5 CL2 200
Chiller:
TAITEC CH-402-BF-42P
Operating temperature: 70°C
Remote console
Status lamp
Power requirements: 200 V, 60Hz, 3 Phase
1996 vintage.
SHIBAURA CDE 80 is a state-of-the-art etcher/asper designed for ease-of-use and reliable results. It features a specially designed thermal head designed to ensure continuous, reliable performance. This thermal head enables rapid heating and cooling in order to produce precise, high-resolution results on a variety of surfaces. SHIBAURA CDE-80 also features an array of integrated technologies such as an enclosed chamber and conformal coating to protect the etching process from dust or other environmental factors. To ensure accurate etching, CDE 80 includes a variety of functions to ensure the highest quality results. The laser control unit provides a variety of laser settings to ensure the correct parameters for a range of different materials, and a high-speed scan unit is able to accurately scan the surface area. A selection of traceability features also ensure accurate production processes for users. The focal plane of CDE-80 is adjustable and can be designated to offer greater control over the etching process. By adjusting the focal plane, users can improve the quality of their etching processes. Additionally, the software provided with the machine can be used to configure the machine and create a variety of different etching patterns. The design of SHIBAURA CDE 80 makes it easy to use and user friendly. All necessary buttons and knobs are placed in a logical manner for easy control, and a clear LCD display offers feedback about the machines' operations. The edges of the machine have been designed with a ergonomic shape and design that makes it comfortable to handle and work with. Overall, SHIBAURA CDE-80 etcher/asper is a reliable and efficient machine that offers precision etching on a variety of materials. The ergonomic design and integrated technology make it easy to use and configure, while the selection of features ensure accurate and efficient etching processes. With its powerful hardware and intuitive software, CDE 80 offers an affordable and reliable solution to anyone who needs a reliable etching and aspeing machine.
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