Used SHIBAURA ICE 300 / CDE 300 #9097207 for sale

SHIBAURA ICE 300 / CDE 300
ID: 9097207
Wafer Size: 12"
Vintage: 2003
Asher, 12" (2) Chambers 2003 vintage.
SHIBAURA ICE 300 / CDE 300 etcher / asher is a high-performance automated patterning equipment that accurately and rapidly processes substrate surfaces up to 300mm in size. This model is capable of generating very high resolutions of up to 5 microns. It is equipped with a powerful modular software-controlled etching system that can accommodate a variety of process chemistries. The unit is designed to support complex substrates including quartz, substrates for integrated circuits, and monolithic substrates with non-uniform topographies. ICE 300 / CDE 300 comes with several features, including a high-precision robotic arm, a sophisticated scrubber to clean the surface of the substrate, and a high-frequency ultrasonic generator. The automated arm is capable of positioning the substrate precisely over the etcher with nanometer accuracy. The powerful scrubber can remove extremely thin layers of material from the substrate surface, allowing for seamless transitions in the patterning process. The high-frequency ultrasonic generator ensures consistent and uniform etching depths. SHIBAURA ICE 300 / CDE 300 leverages powerful motion control software to accurately control etch depth and placement, as well as process parameters such as temperature, concentration, and time. This software enables users to digitally preview and control the spatial differences between neighboring patterns. Other software-controlled functions include the substrate handling study, test polling, and data monitoring. These are designed to reduce unit downtime and optimize throughput. ICE 300 / CDE 300 also utilizes a variety of safety protocols to ensure that it is operating in a safe and reliable manner. This includes an exhaust protalarm machine which monitors both the CO2 and HF concentrations; a ground fault protection tool which monitors electrical current leakage, and a man-machine interlock asset which prevents operator mishandling. SHIBAURA ICE 300 / CDE 300 is an advanced etcher / asher designed to support various process technologies such as wet etching, and dry etching. It provides high-precision patterning capabilities with an extremely accurate and rapid processing speed. This etcher / asher is supported by a powerful software model that can control all its functions accurately and efficiently, and also provides a variety of safety protocols. With its advanced features, this machine is a highly reliable and cost-effective solution for patterning services.
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