Used SHIBAURA ICE/RPA 300 #9405822 for sale

ID: 9405822
Wafer Size: 12"
Vintage: 2005
Remote plasma ashing system, 12" Gases: O2, N2, He, H2, Ar, CF4 APC Pressure control Strong electric board Atmospheric loader ASYST LP Power supply: KYOSAN PC1 Source RF power supply: 3 kW KYOSAN PC1 Vias RF Power supply: 1 kW DAIHEN PC2 Microwave power supply: 3 kW 2005 vintage.
SHIBAURA ICE/RPA 300 is an advanced etcher/asher designed for high-volume process applications. It offers flawless precision and accuracy for etching/ashing results. The machine is composed of a compact base and rigid blank holding unit that comes with a motorized load and drive system for ease of use. Its advanced control-governed heating system provides temperature control capabilities from 100°C to 600°C with an accuracy of +/- 3°C. The heating cartridge has a separate cooling circuit, enabling fast response times and stable temperatures. SHIBAURA ICE/RPA 300 features a powerful programmable controller, capable of controlling process parameters such as speed, temperature, current, power, and pressure. The controller is capable of storing up to 32 processing recipes to quickly run processes without manual input. It is equipped with a color touchscreen and an expanded control panel, which helps operators to accurately set up and monitor their process recipes. The machine is fitted with a powerful vacuum pump that can maintain a vacuum up to 10-5 torr & can be operated in a range of pressures to create and maintain the desired etching/ashing environment. The pump is guarded through a vacuum regulator, to maintain the vacuum for precision etching/ashing. SHIBAURA ICE/RPA 300 also features a pressure gauge and ozone on/off switches that can help operators maintain their process controls. The machine is designed with radiation safety in mind and uses infrared radiation shields to reduce the risk of exposure to dangerous levels. The shields include safety cutouts and temperature sensors, designed to initiate the system shut-off if necessary. SHIBAURA ICE/RPA 300 is perfect for use in manufacturing, medical, and research applications. Boasting precision etching/ashing capabilities, this machine is capable of quickly and accurately etching/ashing various materials. The machine is durable, reliable, and easy to use, making it an excellent choice for high-volume processes.
There are no reviews yet