Used SHIBAURA / SHIBATEC ICE 200 #9404529 for sale
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ID: 9404529
Wafer Size: 8"
Vintage: 2006
Etcher, 8"
Gases: O2, N2
SMIF Loader
APC Pressure control
High electric board
Power supply:
DAIHEN Source microwave power supply: 3 kW
KYOSAN Vias RF Power supply: 1 kW
2006 vintage.
SHIBAURA / SHIBATEC ICE 200 is an etcher/asher for wafer level processes and thermal processes that is used extensively in the semiconductor industry. This equipment is capable of providing high precision and speed for wafer processing, as well as highly accurate and fast thermal processes. The etching / ashing process on SHIBAURA ICE 200 is done in three stages to ensure maximum precision and yields. The first step is the cleaning of the wafer surfaces through a degreasing and detergent process. This process is optimized by a multi-rate wafer handling equipment which is sensitive to contact force and capable of high-speed processing. After the cleaning process is complete, the next step involves the etching or ashing of the wafer surfaces. SHIBATEC ICE 200 is designed to be used with a variety of gases, plasma gases and chemicals, allowing for etching / ashing of a wide range of materials. The last step in the etching / ashing process includes a passivation process which can help protect finished wafers from environmental contamination. Passivation helps to maintain the material's characteristics, as well as preserving its electrical and optical performance. ICE 200 is capable of providing passivation processes that last up to five hours. In order to ensure utmost accuracy, SHIBAURA / SHIBATEC ICE 200 is equipped with an integrated vision system. This unit includes optical microscopy with an adjustable resolution of up to five times the conventional vision machine. This tool also allows for more accurate alignment and positioning of the wafers, enabling etching / ashing to be carried out faster and more precisely. SHIBAURA ICE 200 is also equipped with a highly efficient cooling asset that is capable of providing cooling down to -30°C. This model helps to prevent thermal damage to materials, while also ensuring efficient operation at all times. In summary, SHIBATEC ICE 200 is an etcher/asher that is designed for wafer processing and thermal processes. This versatile equipment provides extremely precise and fast etching/ashing through a three-stage process, and includes an integrated vision system for higher accuracy as well as an efficient cooling unit for more reliable performance.
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