Used SINGULUS / STANGL Singular XP ISE #293752400 for sale
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ID: 293752400
Vintage: 2015
ICP-PECVD System
IR Heater station
(2) EDWARDS iXH1820 Pumps with power supply
Profibus D397-52-880 module
EDWARDS iXL120 Turbomolecular pump
(8) EDWARDS STP-iX3006C Turbomolecular pumps
(4) EDWARDS STP-1003C Turbomolecular pumps
SIEMENS PLC
FESTO Pneumatics
HAMLET Valve
BROOKS AUTOMATION Mass Flow Controller (MFC)
(20) MITSUBISHI MR-J3 Servo amplifiers
(4) ADVANCED ENERGY Apex 5708009 HF Generators
Sensors
LENZE Servomotors
2015 vintage.
SINGULUS / STANGL Singular XP ISE is a cutting-edge etcher/asher equipment that is designed to meet the demanding requirements of the semiconductor industry. This highly advanced tool is capable of providing precise and uniform etching/ashing processes on silicon wafers, offering high throughput and exceptional process control. With its innovative technology and robust design, STANGL Singular XP ISE delivers superior performance and reliability, making it an ideal solution for semiconductor manufacturers looking to achieve the highest level of productivity and efficiency in their production processes. SINGULUS Singular XP ISE features a state-of-the-art process chamber that is designed to optimize the etching/ashing process for maximum performance and repeatability. The chamber is equipped with advanced plasma generation technology that ensures uniform distribution of ions and radicals across the wafer surface, resulting in consistent etching/ashing rates and uniformity. This level of precision and control is essential for achieving the strict process requirements of advanced semiconductor devices with smaller feature sizes and higher densities. One of the key features of Singular XP ISE is its versatile process capabilities, which allow for a wide range of etching/ashing applications. The system supports various process gases, including fluorine-based chemistries for silicon etching and oxygen-based chemistries for organic and inorganic ashing. This flexibility enables semiconductor manufacturers to tailor the etching/ashing processes to meet the specific requirements of their device designs, ensuring optimal performance and yield. In addition to its advanced process capabilities, SINGULUS / STANGL Singular XP ISE is equipped with a range of intelligent features that enhance productivity and ease of use. The unit is designed for high throughput operation, with fast pumping and purging cycles that minimize downtime between process runs. It also features advanced endpoint detection technology that allows for precise control of the etching/ashing process, ensuring optimal results and reducing the risk of over-etching or under-ashing. STANGL Singular XP ISE is built to the highest standards of quality and reliability, with a rugged construction that withstands the rigors of semiconductor manufacturing environments. The machine is engineered for long-term performance and low cost of ownership, with easily replaceable components and minimal maintenance requirements. This ensures that semiconductor manufacturers can rely on SINGULUS Singular XP ISE for consistent and reliable performance, reducing downtime and maximizing productivity. Overall, Singular XP ISE is a cutting-edge etcher/asher tool that offers exceptional performance, reliability, and versatility for semiconductor manufacturing applications. With its advanced technology, precise process control, and intelligent features, SINGULUS / STANGL Singular XP ISE enables semiconductor manufacturers to achieve high yields and quality in their production processes, meeting the demanding requirements of the semiconductor industry and staying ahead of the competition in today's fast-paced semiconductor market.
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