Used SORONA SIE-3102 #9366568 for sale
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SORONA SIE-3102 is an advanced etching and ashing machine that is capable of providing precise and accurate etching and ashing for a variety of substrates. This machine uses a horizontally and vertically aligned etching table to ensure precise positioning and optimal etching results. SIE-3102 has a built-in dry-type cleaning system which removes debris in order to provide a clean vacuum etching and ashing environment. The etching table is capable of providing an inner etching area with a diameter of up to 5 inches and has an etch rate that ranges from 0.005 mils/min to 20 mils/min. SORONA SIE-3102 has a vacuum chamber that utilizes ion pumping to reach a vacuum level of -28 torr for etching large substrates without contamination or damage. The machine also has a simultaneous thermal silicon oxide removal capability similar to reactive ion etching and can reach temperatures up to 1300 °C. SIE-3102 employs a magnetic field in order to provide high selectivity and high mirror image definition with e-beam and ion beam etching or ashing. This machine is able to etch to depths up to 0.5um and is suitable for use on high aspect ratio objects. It also has a thermal oxide removal rate of up to 20 nm/min, as well as a wafer back side passivation rate of up to 10 nm/min. The etching/ashing is performed under a multi-axis control environment that is user-friendly and straightforward. SORONA SIE-3102 also features a built-in image processing software that enables users to adjust the etching parameters in order to achieve the most accurate results. With the help of this software, users can easily generate etching patterns with high definition and fidelity. Additionally, the machine has a real-time monitoring system which allows users to observe the etching process while making any adjustments needed during the etching process. Overall, SIE-3102 is an advanced etching and ashing machine that can provide precise and accurate etching for a variety of substrates. This machine is user-friendly and straightforward, and also features an adjustable vacuum system, a thermal oxide removal capability, and an image processing software for accurate results. SORONA SIE-3102 is suitable for use on substrates of varying sizes and shapes and can be used to create high definition images with high fidelity.
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