Used SPPT / SPTS CPX-APS #293648886 for sale

SPPT/SPPT / SPTS CPX-APS is an advanced etcher/asher used for processes such as silicon etching, SILC etching, tungsten etching, and aluminum etching. This equipment is perfect for most advanced etching processes, including high-aspect-ratio and high- selectivity processes. It operates using a unique combination of radio frequency (RF) and direct current (DC) power sources, allowing for greater process control and accuracy. SPPT CPX-APS is a fully integrated, robust etch chamber system designed for both etching and ashing Thin Film Deposition (TFD) processes in a single unit. It is equipped with a user-friendly touch screen Human Machine Interface (HMI) control which can easily be programmed for multiple etch/ash sequences in a single process run. This etcher/asher offers a wide range of process parameters, including chamber temperatures up to 250*C, etch/ash pressures up to 187 mTorr, and a combination of argon/oxygen chemistries for optimal process performance. SPTS CPX-APS offers excellent process uniformity, repeatability, and speed for IC level manufacturing. The etcher/asher features a 200nm oxidation rate leveling unit which allows for very uniform etching of features without sacrificing speed. The machine is also capable of deep trench etching and aspect ratios up to 10:1 and higher. Additionally, there is a 3D etching/profiling capability with optimized process control to produce very high process repeatability and precision with minimal IC degradation. CPX-APS is designed to meet the stringent safety requirements of ICs. The tool features an innovative safety shield asset to accurately detect process malfunctions and provide real-time notifications. It also features an integrated vacuum interlock model that prevents un-erasable IC damage by automatically shutting down the chamber in the event of a process over-etch or out-gassing. SPPT / SPTS CPX-APS is also equipped with a variety of advanced diagnostic tools, including real-time diagnostics, machine and process state diagnostics, and process data. The advanced features and capabilities of the equipment make it highly suitable for high-volume IC production and extreme process requirements. Additionally, the edge isolation control system feature can reduce slow edge movement, providing additional edge protection, and increasing the device reliability. In conclusion, SPPT CPX-APS is a powerful and highly versatile etcher/asher that offers advanced etching and ashing capabilities with superior process control. It is designed with advanced safety features and a wide range of user-friendly features, making it perfect for IC manufacturing. The unit provides superior process repeatability and accuracy as well as excellent process performance and uniformity.