Used SPPT / SPTS VPX Pegasus #293648861 for sale
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ID: 293648861
Wafer Size: 6"
Vintage: 2011
System, 6"
OSAKA Vacuum turbo pump
(2) Chamber consoles
(3) Chillers
Platform console
Chamber
2011 vintage.
SPPT / SPTS VPX Pegasus is an advanced etching and ashing equipment, used for high resolution photolithography processing. Developed by SPIC Technologies, this device is used to etch and ash materials, like silicon, SiO2 and polymers, in a very precise and reliable manner. SPPT VPX Pegasus comes with an array of features, including an integrated, 12-cuvette positioning stage, a reliable quartz vacuum chamber, multi-zone oxidation, and a high resolution Capacitance Extraction Laser Interferometer (CELIF). All of these components help ensure accuracy and quality when etching and ashing materials. The 12-cuvette positioning stage helps ensure that all of the etched and ashed materials are perfectly aligned prior to being processed. This is done through a variety of adjustment parameters, including positional resolution and precision, acceleration, velocity, and linearity. The quartz vacuum chamber, on the other hand, provides a reliable and secure environment for the etching and ashing process. It is comprised of a solid-base platform and stainless steel walls, preventing any hazardous vapors from entering the workspace. Furthermore, the quartz vacuum chamber is equipped with an automated vacuum system and a graphite-filled interior, ensuring an extremely long lifespan. The high-end CELIF laser interferometer, is used for precise high-resolution Capacitance Extraction. Its advanced scanning capability is able to measure surface contaminations in the process, while simultaneously providing measurement feedback. This ensures that the highest levels of accuracy are attained and maintained during the etching and ashing process. Finally, SPTS VPX Pegasus unit is also capable of multi-zone oxidation through its proprietary multi-zone oxidizing technology. Utilizing this technique, the user can apply a variety of thermal oxidation processes on various types of substrates and materials, thereby achieving the desired layer thickness and etching/ashing results. Overall, VPX Pegasus is a powerful and reliable etching and ashing machine. Through its array of features and cutting edge technologies, it is capable of providing precise and consistent results. From etching, to ashing and even multi-zone oxidation, SPPT / SPTS VPX Pegasus is guaranteed to turn any etching and ashing project into a successful one.
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