Used SPPT / SPTS VPX Pegasus #293648863 for sale

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ID: 293648863
Wafer Size: 6"
Vintage: 2011
System, 6" (2) OSAKA Vacuum turbo pumps (3) Chillers (2) Chambers Platform console Chamber console Scroll pump 2011 vintage.
SPPT / SPTS VPX Pegasus is an etcher/asher developed by SPPT Technologies, a leading innovator in advanced manufacturing solutions for the semiconductor and related industries. This versatile etcher/asher was designed to perform oxidation, metal etch, deposition and planarization processes, minimizing substrate damage and process variability while ensuring consistent quality across multiple substrates. SPPT VPX Pegasus utilizes a micro-positioner, allowing users to accurately control the rate of etching, oxidation, and planarization, while maintaining uniformity and repeatability in the process. This feature allows for quick and accurate process calibration, increasing throughput and accuracy. Additionally, the innovative vacuum equipment and chamber design of the Pegasus help to reduce contamination and ensure optimal plasma conditions, enabling superior etching and oxidation results. SPTS Pegasus features a powerful, yet easy-to-use control system that allows for precise process control and unit monitoring. The user-friendly interface ensures quick and accurate process parameters, while providing easy access to advanced machine and process settings. This enables repeatability and improved process optimization. For enhanced quality and reliability, SPPT / SPTS Pegasus also has integrated safety mechanisms, including automatic process safety checks and optional safety, security, and procedural alarms. To ensure the highest safety standards, all safety conditions are monitored by the tool, and any defects are automatically detected for corrective action. SPPT Pegasus is an all-purpose etcher/asher that is capable of performing both wet and dry etching, oxidation and deposition, and planarization processes. With its wide range of process capabilities, users have the ability to create complex structures on a variety of substrates and materials. SPTS Pegasus is also designed to be configurable, meaning that users can tailor the asset to their specific needs. This makes it an ideal choice for those who require a reliable and efficient process for etching and planarization of various materials and substrates.
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