Used SPPT / SPTS VPX Pegasus #293655827 for sale

SPPT / SPTS VPX Pegasus
ID: 293655827
Wafer Size: 6"
IPC System, 6".
SPPT / SPTS VPX Pegasus is an advanced etcher and asher that has been designed to deliver the highest precision etching and ashing in the most demanding processes. The Pegasus has been developed with robust, industrial-grade components and is designed to deliver maximum performance and reliability in semiconductor fabrication processes. The Pegasus can be used to etch and as interface geometries through a range of materials such as silicon, quartz, and germanium, as well as a variety of surface treatments. The high quality results that can be achieved by SPPT VPX Pegasus are due to the precise control over the etching processes that it is able to deliver, as well as its highly repeatable results which are essential to maintain process consistency throughout the fabrication process. SPTS VPX Pegasus is designed to be used in highly automated manufacturing environments thanks to its flexible and easy-to-configure control system. The etcher is able to effectively etch and as a range of intricate geometries, enabling the user to achieve the highest fabrication accuracy. The etcher is also equipped with a wide range of etching options, including multi-level etching, so tailor the etching process for specific applications. The Pegasus also offers the flexibility of an optional turbo-pulsing function that enables the etching process to be optimized for the material being etched or ashed. The Pegasus is able to achieve high levels of speed and accuracy as well as low levels of contamination, maintaining the integrity of the device being fabricated. This is possible thanks to various integrated safety systems that monitor multiple parameters throughout the etching and ashing processes, such as process gases, the coolant temperature, the chamber pressure, and the mechanical alignment of the tool, providing protection against potential damage to sensitive components. VPX Pegasus is the ideal etcher and asher for the most demanding fabrication applications that require the highest levels of speed, precision, and reliability. It is designed with the latest technology and features that enable the user to achieve the highest quality results, while also providing a safe and reliable etching and ashing process.
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