Used SPS Plamax #293664085 for sale

SPS Plamax is a high-performance etching and ashing system used in semiconductor device fabrication processes. It is a high-temperature, automated etching and ashing unit, designed to facilitate the application of both short-term and high-temperature sustained ashing. Plamax consists of three main components: a furnace, an RF generator, and an RIE tool. The furnace has a temperature range of up to 1100°C and provides rapid temperature ramp capability with precise control. It also includes vertical lift processing, which allows the tool to process a wide variety of substrates ranging from 200mm to 400mm. The RF generator provides variable power output, making it capable of etching and ashing thick material. The RF generator also has a wide range of processing gas mixtures from Ar/O2 to SF6/O2, allowing for a high degree of control over etching and ashing results. The RIE tool provides precise etching depth control and smoothness of etching and ashing, allowing for higher aspect ratios and better aspect control. It also has an automated process control system allowing for high-precision, repeatable processes and maximum repeatability and consistency. SPS Plamax is capable of both batch and single wafer configuration. The automatic cassette-to-cassette transfer allows for seamless wafer handling and fast operation. Special modules are available to control the substrate position which provides precision alignment and minimizes the impact of uneven wafer structure. Plamax is designed to provide high yield, high accuracy, and fast etch and ashing processing. Its superior process control capability and reliable system performance make it a preferred choice for device fabrication. With its versatile process capabilities, SPS Plamax can be used for both etching and ashing a variety of materials in a range of thicknesses across a variety of substrates.