Used SPTS / APPLIED MICROSTRUCTURES MVD150 #293831476 for sale
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ID: 293831476
Wafer Size: 8"
Molecular Vapor Deposition (MVD) system, 8"
Single chamber
O2 Plasma generator
Onboard liquid ampules
Aera: PA-781C 10L N2
Aera: PA-780C 500 SCCM O2
Dry pumps:
BUSCH BA100
Cooling trap on fore line.
SPTS / APPLIED MICROSTRUCTURES MVD150 is a highly advanced etcher/asher equipment designed for microfabrication processes in the semiconductor industry. This versatile tool is widely utilized for etching and cleaning applications in the production of semiconductor devices, MEMS (Micro-Electro-Mechanical Systems), and other microelectronics components. One of the key features of SPTS MVD150 is its advanced process control capabilities, which allow for precise and repeatable etching and ashing processes. This results in superior process uniformity and device performance, essential for achieving high yield and reliability in semiconductor manufacturing. The system utilizes a combination of plasma etching and ashing techniques to selectively remove materials from substrates. The plasma source generates reactive species that interact with the material on the substrate surface, leading to etching or cleaning of the substrate. APPLIED MICROSTRUCTURES MVD150 is equipped with a range of gas sources and process recipes to accommodate a variety of materials and process requirements. MVD150 features a high-performance vacuum chamber that maintains precise process conditions, including pressure, temperature, and gas flow rates. This ensures that the etching and ashing processes are carried out in a controlled environment, minimizing contamination and ensuring high process repeatability. The unit is equipped with an advanced RF (Radio Frequency) power supply that provides the energy needed to create and sustain the plasma in the chamber. The RF power can be modulated to optimize process conditions for different materials and substrates, allowing for fine-tuning of etching and ashing parameters. SPTS / APPLIED MICROSTRUCTURES MVD150 is also equipped with a state-of-the-art gas delivery machine that allows for precise control of gas flow rates and mixtures. This ensures that the right combination of gases is delivered to the chamber during the etching and ashing processes, enabling selective removal of materials with high selectivity and uniformity. The tool is controlled by a user-friendly interface that allows operators to program and monitor process parameters in real-time. Process recipes can be easily customized to meet specific application requirements, and data logging and reporting features enable process optimization and troubleshooting. SPTS MVD150 is designed with safety and reliability in mind, featuring interlocks and safety systems to protect operators and equipment during operation. The asset is also engineered for ease of maintenance, with accessible components and serviceable parts that minimize downtime and ensure continuous operation. Overall, APPLIED MICROSTRUCTURES MVD150 is a cutting-edge etcher/asher model that offers unparalleled performance and precision for microfabrication processes in the semiconductor industry. With its advanced process control capabilities, versatile gas delivery equipment, and user-friendly interface, MVD150 is a valuable tool for semiconductor manufacturers looking to achieve high-quality and reliable device fabrication.
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