Used SPTS PRIMAXX #293810530 for sale

SPTS Primaxx is a precision dry-etching and ashing solution suitable for the most demanding micromachining requirements. Primaxx utilizes a reliable substrate rotation component for precise control of the etch chemistry and substrate temperature, resulting in a consistently high-quality product. With the addition of a Low Stress Wafer Holder, SPTS Primaxx can process silicon and compound materials up to 200mm diameter wafers. Primaxx is built on the latest hardware and software, allowing for a wide range of process capabilities and flexibility. A unique process flow control menu allows the user to easily select a unique recipe and repeat it across multiple wafers. SPTS Primaxx has advanced, auto-recirculate pump management, which eliminates the need to manually replenish etch chemicals. Primaxx is designed for high-throughput production in research and production facilities. The system has a wide range of etch select recipes, creating the necessary conditions for high-detail patterning. The etch select technology also eliminates the need for frequent scrubbing, ensuring improved long-term etching accuracy. SPTS Primaxx also includes an open-architecture, PC-based process control system with a full suite of process and diagnostic tools for setting etch and clean parameters. Primaxx is a versatile, robust etcher/asher with all the features professionals need to ensure exacting performance—including adjustable gap flow-forming, adjustable gas flow control, and adjustable pressure-control setting—while minimizing consumable costs and maximizing wafer manipulation. It is also compatible with various guide cars and wafer carriers, with regular maintenance ensuring that SPTS Primaxx meets the most exacting standards.