Used SPTS PRIMAXX #293811099 for sale

SPTS Primaxx is an advanced Etch/Ash process tool that offers multiple wafer processing capabilities in a single platform. Its innovative design and advanced technology allow for a low total cost of ownership, making it an ideal process tool for the semiconductor industry. The equipment features a unique low power plasma etch/ash coupled with a high throughput reactive ion etch/ash (RIE) process. The two-in-one system has a reciprocating bi-directional electron beam for both etch and ash operations. It is capable of processing up to 200mm wafers and has a plasma uniformity of 99.98%. Primaxx also features a fast and efficient heating unit, with an aromatic compound film heater and an electron beam heating element. The machine is capable of heating wafers up to 400°C in less than 10 minutes. This enables it to create uniform films at higher etch rates and higher deposition rates, for improved process performance. SPTS Primaxx can process a wide range of materials, including but not limited to silicon, glass, gallium arsenide, and indium phosphide. It can also process specialty devices such as MEMS, LEDs, and optoelectronic components. The motion control tool of Primaxx is designed for high-accuracy etch and ash operations. It has an integrated interlocking mechanism, allowing it to perform multiple operations on a single wafer with precise positioning and alignment. SPTS Primaxx runs a fully automated, software-controlled process. It is capable of single-pass etch/ash operations for high throughput. This makes it suitable for both R&D and production applications, allowing users to quickly and precisely process a wide range of materials. Primaxx offers a wide range of process options and can be tailored to specific application requirements. This includes etch and ash, etch and deposition, or combinations of the two. It also features an auto-calibration asset that allows for wafer-to-wafer process consistency. The automated model can be remotely managed and monitored. SPTS Primaxx is an advanced, versatile etch/ash tool that offers an excellent cost-to-performance ratio. It is suitable for a variety of applications, from large volume production to exploratory research. Its powerful features and automated process control makes it an ideal choice for the semiconductor industry.