Used SPTS Sigma Fx P300 #9289687 for sale
URL successfully copied!
Tap to zoom
ID: 9289687
Vintage: 2015
System
(2) HSE
Etch chamber
(3) Process chambers
MWD Degas chamber
MWD Degas chamber height: 2.5m
(2) Transport chambers / Load lock chamber
TM Chamber
OTF Sensor
(3) EFEM Load ports
Dual blade for high throughput
Labyrinth chambers
(4) Dry pumps:
iGx 600N
(3) iGx 100L
2015 vintage.
SPTS Sigma Fx P300 is an etcher and asher equipment designed for semiconductor processing and precise nanotechnology applications. It is a powerful e-beam evaporator with independent precise beam positions for etching, sputtering, and other processes. Its features include a high-resolution image recognition system with convolution filters and pattern recognition. The P300 is constructed with a two-part chamber design that features a unique vacuum envelope-style construction to ensure vacuum integrity. This chamber architecture also reduces pumping losses and decreases particle trapping by providing a well-defined separation between the vacuum and ult-clean working environments. Sigma Fx P300 utilizes a multi-source design that enables multiple deposition and etching processes to be performed simultaneously. This unit also has an automated stage and multiple substrate interfaces, to enable a wide range of configurations. Components such as a transfer machine, robot arm, and conveyor are available to enable large-scale production environment. The P300 tool is built to handle a variety of tasks, such as the deposition and etching of metallized and dielectric layers, creation and deposition of dielectric structures, and 3D patterning of structure arrays in high-frequency applications. It has a vacuum asset capable of managing a wide range of process pressures that range from ultra-high vacuum (UHV) to atmospheric. Additionally, the P300 has a Monte Carlo based curve fitting algorithm under user control that makes it easy to adjust recipes for different processes. An interface to design tools such as CAD and Physics attributes also provide great control over the fabrication of process recipes. The model also has temperature and humidity control features and can be employed in Class1 cleanroom environments. Its comprehensive alarm equipment and maintenance tracking provides preventative maintenance features and raises alarms when necessary. SPTS Sigma Fx P300 is a powerful and reliable etcher and asher suitable for use in nanotechnology applications and its comprehensive features make it a great choice for semiconductor processing.
There are no reviews yet