Used SPTS Sigma FxP #9353219 for sale
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SPTS Sigma FxP is an advanced etcher/asher equipment designed to enable high-precision, high-throughput etching and ashing of a variety of materials. This system combines high-level performance with a low cost of ownership, making it an ideal choice for both research and industrial purposes. The unit uses pulsed plasma technology, powered by a series of three 800W, 13.56MHz source magnets, to deliver precise, repeatable etching and ashing results over a wide range of materials and wafer sizes. The machine is controlled by a computer-controlled process sequencer which allows for easy customization of etching and ashing recipes. The tool has an onboard vacuum chucks which can be used to process up to 4", 8" or 12" wafers. Sigma FxP has a wide range of advanced features, including a high-resolution optical view port for easy recipe setup and monitoring, as well as a 2″ view port for secondary monitoring of the etching and ashing process. The asset also includes an automated wafer loading model which can automate the loading of wafers between process steps, saving time and increasing efficiency. SPTS Sigma FxP equipment also provides ample flexibility to modify existing recipes and create custom recipes to best suit user needs. This can be achieved through the system's onboard recipe database, which stores all etching and ashing recipes and parameters. In addition, the unit boasts a low cost of ownership, with great results obtainable after only a few hours of use. Overall, Sigma FxP etcher and asher machine offers a great solution for advanced, precise etching and ashing needs, with minimal cost of ownership and excellent results. This tool is an ideal choice for the research and industrial settings alike, as it can be easily customized to meet specific needs and requirements.
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