Used SPTS Sigma #293751255 for sale

SPTS Sigma is an etcher/asher designed for the purpose of removing photoresist and other layers of material from wafers in advanced micro-fabrication processes. It is designed in such a way that it enables an easy transfer to be obtained between the workpiece and the etcher. Sigma is a high precision machine with its capabilities including a process chamber designed to produce very low particle generation; high process speed; and superior etch rate control. The main feature of SPTS Sigma etcher is its integrated vacuum/plasma equipment which incorporates both etching and ashing functions in a single unit. This means that it is able to cater for multiple process flow paths, allowing for efficient inline processing. In addition, this system includes automatic vacuum switching which optimizes the process depending on the workpiece and ensures consistent etch results. For control, Sigma is equipped with advanced software that enables users to accurately program the quantities, functions and parameters required for the desired etch. It can be used for both manual and fully automated processes. In terms of safety and maintenance, SPTS Sigma has a range of measures in place to ensure user safety. These include an interlock unit which prevents the machine from being operated when the etcher door is open, and the added feature of a water tank pressure control machine which helps provide control of potential water leakage. Furthermore, Sigma is designed to provide reliable performance with minimal preventive and diagnostic maintenance. Overall, SPTS Sigma is a powerful, cost-effective etching and ashing tool with a range of features designed to enable precision results, safety and reliability. It is ideal for use in micro-fabrication processes and is a great choice for those looking to bring their processes up to the highest standard.