Used SPTS VPX Pegasus #9051077 for sale

SPTS VPX Pegasus is a fully automated etcher / asher that provides batch capabilities for deep CDs (DCB) and etching / ashing of silicon wafers, MEMS, and other substrates up to 200mm in diameter. It is an advanced solution for advanced etching, plasma ashing, and chemical oxide stripping. VPX Pegasus comes with two process chambers, an etcher Chamber and an Ashing Chamber. The etcher chamber is capable of handling complex etch recipes with up to 2500 watts of power. The advanced etcher can achieve high selectivity ratios and has an integrated generator for deep CDs. The Ashing Chamber provides for high temperatures for plasma ashing, gas ashing, and chemical oxide stripping. The advanced temperature control and high thermal transfer rate give consistent and uniform asher results. SPTS VPX Pegasus is a fully automated etcher / ashing equipment. It provides computer-controlled setup and process execution, with memory storage and recovery to ensure consistent process results. The factory installed recipe module enables etch recipes to be saved to a secure recipe library. The system also features a heat pipe ashing technology that delivers fast cycling times and an automatic wafer loading unit for easy loading and unloading of substrates. The machine also includes advanced process analysis such as endpoint detection, feature recognition, and particle detection. The particle detection feature enables direct validation of results from the etch / ashing process. VPX Pegasus is designed to meet the high-end industrial applications for etching and ashing processes. It offers high precision, repeatable results, high throughput, and robust processing capabilities. The tool is well suited for MEMS, silicon, GaAs, and other high-end substrates for advanced etching and ashing applications.