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Marketplace
Etchers / Ashers
STS / CPX
Multiplex ASE
#293748419
Used STS / CPX Multiplex ASE #293748419 for sale
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Etchers / Ashers
Manufacturer
STS / CPX
Model
Multiplex ASE
Equipment Details
Reviews
ID:
293748419
Wafer Size:
4"-6"
Vintage:
1997
ICP Etcher, 4"-6" Vacuum pump Chamber type: Ceramic chamber Process: SiO and Bosch ESC Chuck SEIKO SEIKI Turbo pump EDWARDS QDP40/EH250 Pump 1997 vintage.
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