Used STS / CPX Multiplex ICP #293633096 for sale
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STS / CPX Multiplex ICP (Inductively Coupled Plasma) etcher/asher is an advanced equipment for reactive ion etching and ashing of substrates. It utilizes a powerful and efficient inductively coupled plasma (ICP) source to provide high-speed, high-precision and uniform etching and ashing operations. The system is capable of processing a wide variety of substrates that require etching or ashing, including metals, dielectrics, semiconductors and compound materials. The STSGCPX STS Multiplex ICP etcher/asher combines the proven performance and advanced features of the standard STS machine with a high performance ICP source to enable etching and ashing of very demanding substrates. The ICP source delivers high ion density, high-energy ion bombardment, directed through a precisely controlled nozzle and directed onto the substrate to enable uniform etching or ashing. The unit also provides unparalleled uniformity and repeatability, with the ability to achieve fractions of a micron of accuracy at higher etch rates. The machine includes an integrated processing chamber, capable of multiple process cycles and wide temperature range. An integrated gas delivery tool allows for precise control of gas chemistry flow and pressure, helping to maximize etch rates and reduce contamination of the substrate and chamber. The asset is also equipped with a user-friendly, multi-screen graphical interface, allowing for easy user operation to facilitate exceptional performance. CPX Multiplex ICP etcher/asher provides users the ability to safely, efficiently and accurately etch and asher a wide range of materials, including dielectric and metallic materials. The model offers high-volume producibility, high repeatability, excellent cooling capabilities and low operating costs making it an ideal choice for etching and ashing manufacturing, prototyping and research applications. The equipment is highly versatile, and is capable of processing a wide range of substrates and applications, with the ability to customize its operation to the individual needs of the user.
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