Used STS / CPX Multiplex ICP #9185200 for sale
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ID: 9185200
Wafer Size: 8"
Vintage: 1999
Dry etcher, 8"
BOSCH Process
Handler
Chiller
Turbo pump
HF Generator
Carousel vacuum load lock
With ICP SR / HR process chamber
Pumps: No
EPD: No
Lower electrode PSU: No LF
Wafer flat size: Other
Clamp: WTC
Gas box: Mini
ASE Requirement: Switched licence
Voltage: 400V
Gases:
C4F8 100 sccm
O2 100 sccm
Ar 100 sccm
He 100 sccm
SF6 100 sccm
Multiplex ICP process chamber (MESC)
ICP 240BF Source
RF Supply: 1 kW (13.56 MHz)
Matching unit for ICP source
Generator: 5 kW
RF Supply: 300 / 30 Watt (13.56 MHz)
Matching unit for lower electrode
Electrode temperature control: +5 to +40°C
Mechanical wafer clamping electrode (Pin lift)
With backside cooling
LEYBOLD Turbo pump MAC 2000
Standalone VDU
Keyboard
Mouse
SOI Kit: No
CE Marked
1999 vintage.
STS / CPX Multiplex ICP is an advanced etcher/asher equipment that uses multiple individual processes to achieve high-precision microfabrication of metal parts. The system is composed of an inductively-coupled plasma source (ICP) and a multiplexed RF generator, which is capable of firing multiple ICP sources in sequence. The ICP source is configured so that the RF generator fires in four synchronised cycles, providing a continuous high-power plasma stream over a wide area in the chamber. The ICP source has a broad frequency range, allowing for intricate pattern control and more precise surface etch rates. The ICP source is also capable of etching deeper metals and coated surfaces with minimal distortion and high-yield. The multiplexed RF generator contains multiple channels, each capable of delivering high-power pulses to the ICP source. This provides a flexible etching environment as well as extremely uniform etch rates. The multiplexed RF generator also allows for precise timing between the ICP sources, allowing them to fire in sync and maximizing process throughput. STS Multiplex ICP etch/ash unit has been shown to provide high-quality film deposition and etching of various metal substrates, including copper, aluminum, nickel, and steel. The machine is also capable of etching complex patterns and high-precision surfaces. In addition, the tool can also be used to fabricate 3D-printed components using metal powder particles or fragmented films. CPX Multiplex ICP is a versatile and reliable etcher/asher asset capable of providing high-quality, consistent, and well-controlled results for a variety of processes. It is a reliable solution for both microfabrication and 3D printing applications, and can be used for high-precision etching of metals and other materials.
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