Used STS / CPX Multiplex ICP #9363071 for sale

STS / CPX Multiplex ICP is an automated inductively coupled plasma etcher/asher that utilizes Inductively Coupled Plasma (ICP) to create physical masks on a variety of substrates such as silicon and polymers, as well as glass and other materials. The ICP etcher/asher provides a cost-effective solution for high-accuracy, high-resolution imaging, deposition and etching/ashing for industrial and research applications. STS Multiplex ICP is a highly versatile device capable of processing a wide range of substrates and materials. It provides precise, repeatable physical masking with minimal residue using ICP-based technology. The High-Voltage Impulse Technology (HVIT) used to create the plasma provides a low-cost, high-throughput solution for etching and ashing applications on highly sensitive substrates. CPX Multiplex ICP's wide process window ensures a highly uniform result, even on small substrates such as MEMS sensors and chips. The equipment drivable software provides for easy operation and guarantees repeatable, high quality results with a reliable etch rate. Software controls, such as pulse energy and pulse repetition rate, enable the user to customize and control the process parameters. The system is equipped with an intuitive electronic controllable user interface which enables users to monitor and manipulate etch parameters as needed. Multiplex ICP is designed for both high-aspect-ratio and low-aspect-ratio substrates, ensuring consistent results. Its high-angle deposition capability enables fabrication of intricate structures with high accuracy, providing the user with a broad range of options to produce complex masks with high accuracy. STS / CPX Multiplex ICP device also features a rugged EDGE heating unit for efficient and reliable operation. The EDGE allows the substrate to be heated to achieve high-speed etch and ashing. The capable of handling substrates of various sizes (internal or external) with a broad temperature range, the EDGE machine ensures uniform temperatures for consistent etch rates and uniform masking shapes. The strong global support network ensures maintenance and technical assistance when needed. The capability of connecting the tool to a network allows for remote troubleshooting and technical support in case of emergencies, greatly reducing downtime and increasing productivity. In conclusion, STS Multiplex ICP is an advanced etcher/asher that provides excellent uniformity and repeatability across a broad range of substrates. Its combination of affordable price, reliable EDGE heating asset, powerful software controls, and global support network make it an ideal choice for etching/ashing.