Used STS MXP Multiplex #9005442 for sale
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ID: 9005442
Wafer Size: 6"
Vintage: 2003
ICP HR Chlorine etch system, 6"
Process: Silicon etch bosch
Capable, 2"-8"
EDWARDS E2M40 Loadlock pump
PFEIFFER MAG 2000 High vacuum pump
EDWARDS IQMB250 Roughing pump
EDWARDS IQDP80 Roughing pump
ADVANCED ENERGY RFG 3001 RF Generator
HUBER Unistat 140 W
Loadlock
(5) Gases
Chiller
Gases: BCl3, Cl2, O2, Ar, He
Accessories:
Balun coil ICP V2
Mechanical clamp
Helium backside cooling
(2) MkIV MPX Carousel, 6"
Power supply: 3 kW, 300 / 30 W Platen
Purge gas line
E-Rack modules:
HCL1
HCU3
HCU5
VAC3Y
(2) AMC1
HBC2
Operating system: Windows 2000
Power supply: 400 V, 50 Hz, 40 Amp, 3 Phase
Configured power supply: 208/460 V, 60 Hz, 3 Phase
CE Marked
2003 vintage.
STS MXP Multiplex is a high-quality integrated etcher / asher designed to meet the highest standard. Multipurpose capability and flexibility have been designed into the innovative equipment enabling users to etch and asher in the same module with quick, easy and reliable processing of a wide range of different materials. MXP Multiplex with etch and asher capability is a compact, efficient and effective all-in-one processing solution. It has a DIN compatible architecture, which is modular enough to permit choice of either etch or asher operation. The system runs on both AC and DC power supplies for flexible operation, and a simple user-friendly interface makes it easy to set up and use. An advanced heated etching chamber can provide extremely accurate, high-resolution etching results, with absolute control over temperature and exposure time. The chamber is designed to ensure uniform processing conditions, with precise temperature control and a high degree of uniformity over a wide range of etching materials. In addition, the heating and cooling elements are designed to provide maximum safety and energy efficiency. The integrated asher ensures maximum accuracy and efficiency when processing materials requiring both etching and ashing. Unlike traditional ashing systems, STS MXP Multiplex features active, open-air, ashing capabilities, enabling accurate, rapid processing of both wet and dry ashing materials. The unit is particularly suited to multi-layer etched/ashed substrates, ensuring superior accuracy, throughput and reliability. MXP Multiplex can be easily integrated with other etcher/asher systems or stand-alone machines, providing users with flexibility, scalability, and cost-savings. In addition, the machine is highly compatible with most types of boards and materials, including epoxy, polyimide and acrylic laminates. High-speed, accurate, and reliable, STS MXP Multiplex is the perfect choice for designers and engineers needing to quickly process a variety of substrates with precision. It provides users with an easy to use, user-friendly solution that quickly and accurately processes both etching and ashing projects and ensures superior results.
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