Used STS Pro ICP #9294114 for sale
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ID: 9294114
Wafer Size: 8"
Etcher, 8"
(2) Load ports, 8" (Can process 25 wafers)
Operating system: Windows
Vacuum load lock:
Carousel load lock, 8" (Can process 2 wafers)
Chamber lid temperature control
Automatic transfer of substrates between load-lock and process chamber
Process chamber:
Turbo pump
Chiller
Single wafer process chamber
VAT Pendulum valve
Backside helium cooling
Remote sealed extracted gas box with welded gas lines
Electronic cabinet
LCD Flat panel monitor
Automatic multistep processing / Manual operation
High frequency RF Generator
Low frequency RF Generator
Vacuum pump (Load lock)
Vacuum pump (Chamber)
ESD Chuck
System cables.
STS Pro ICP is a state-of-the-art etcher/asher which provides speed and precision for industrial, scientific, and medical application processes. This etcher/asher maintains a superior quality output of designs and measurements in virtually any environment. STS ICP has a top-of-the-line milling head with an impressive speed of up to 80,000 RPM. Its high-precision motors and feed rate allows for detail-intense etching and ashing jobs with smooth results at high yields. Its pneumatically-controlled design incorporates an LCD display for convenient monitoring of production setting adjustments. STS ICP is also compatible with a wide range of widths and depths, ranging from 200 to 2000 mm and 3 to 12mm respectively, while providing precise control during the production process. It can also accommodate up to three types of tips for etching into various surfaces. Along with its impressive production speed and range of settings, STS ICP also features dual vacuum-assisted systems which ensures accuracy and prevents oxidation of the ashed surfaces. STS ICP comes with a built-in machine vision system which assists with automated alignment and centering, taking into account every bit of detail with extreme accuracy. It is also equipped with a galvanometer and water-cooled tip control for added precision and repeatability. Using STS ICP's high-tech hardware and sophisticated software, its users can be sure that they have access to the most reliable and precise etching and ashing solutions available. This product is suitable for a wide range of uses in microscopy, medical device, optoelectronics, microelectronics, and other engineering and scientific applications. With its unbeatable accuracy, fast processing time, and durable construction, STS ICP is the perfect tool for any industrial environment.
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