Used STS Pro ICP #9304690 for sale
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ID: 9304690
Etcher, 8", parts system
(2) Load ports, 8" (Can process 25 wafers)
Operating system: Windows
Vacuum load lock:
Carousel load lock, 8" (Can process 2 wafers)
Chamber lid temperature control
Automatic transfer of substrates between load-lock and process chamber
Process chamber:
Turbo pump
Chiller
Single wafer process chamber
VAT Pendulum valve
Backside helium cooling
Remote sealed extracted gas box with welded gas lines
Electronic cabinet
LCD Flat panel monitor
Automatic multistep processing / Manual operation
High frequency RF Generator
Low frequency RF Generator
Vacuum pump (Load lock)
Vacuum pump (Chamber)
ESD Chuck
System cables.
STS Pro ICP (Inductively Coupled Plasma Etch/Asher) is an advanced etcher/asher developed by STS Technologies, Inc., a leading provider of etching and ablation equipment. This machine uses the direct coupling of a high-power radio frequency generator to an induction coil to deliver a high-accuracy, uniform plasma field over a wide range of frequencies. This leads to faster etch and asher times, enhanced reproducibility, and superior microscopic and nanoscopic precision. Pro ICP systems are used in a wide variety of etching and ablation applications, including UV laser etching, plasma etching, multi-layer etching, chemical vapor deposition, sputter etching, and laser ablation. STS Pro ICP can process one or more substrates at the same time, with adjustable temperature and pressure, and the ability to preset etch or asher profiles. The multi-layer etch and asher processes are suitable for a variety of materials, including thin-film solar cells, lithium-ion and li-ion battery materials, microelectronics, and other nanomaterials. Pro ICP machine is equipped with an advanced smart control equipment that can monitor and adjust parameters such as plasma energy, rate of gas flow, etch parameters, and other relevant variables. It is also capable of executing automated functions such as wafer edge processing, uniform etching, and layer etching. This makes STS Pro ICP an ideal tool for achieving highly accurate and precise etch and asher results. Additionally, the machine can be integrated with existing systems for automated sample processing, allowing users to optimize their production processes. Pro ICP system is designed to provide end users with superior reliability, safety, and performance. The unit is equipped with a safety interlock machine and is ETL Certified (electrical testing laboratory) to UL (Underwriters Laboratories) standards. The etching and ablation processes are protected by a unique vacuum tool that ensures that particles do not become a contaminant to the surrounding environment. With STS Pro ICP, users can rest assured that they are achieving the highest level of quality and accuracy, with minimal risk and maximum reaction control.
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