Used SUMITOMO F-70H #293752729 for sale
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SUMITOMO F-70H is a cutting-edge etcher and asher equipment designed for semiconductor processing applications. This advanced tool leverages plasma technology to precisely etch and clean substrates with high efficiency and accuracy. SUMITOMO F70H is a versatile system that can be used for a wide range of applications in the semiconductor industry, including photomask cleaning, resist ashing, and dielectric etching. One of the key features of F-70H is its robust and reliable plasma source. The unit is equipped with a high-power RF plasma generator that can generate a highly uniform plasma with excellent process stability. This plasma source is essential for achieving precise and uniform etching and cleaning results on substrates. F70H also features a sophisticated gas delivery machine that allows for precise control of gas flow rates and gas mixtures. This enables users to tailor the etching and cleaning processes to meet the specific requirements of their applications. The gas delivery tool is equipped with mass flow controllers and pressure regulators to ensure consistent and reproducible results. In addition to its advanced plasma source and gas delivery asset, SUMITOMO F-70H is equipped with a highly configurable process chamber. The chamber is designed to accommodate substrates of various sizes and shapes, making it suitable for a wide range of applications. The chamber is also equipped with a heating and cooling model to control the temperature of the substrate during processing. SUMITOMO F70H is controlled by a sophisticated computerized equipment that enables users to program and optimize etching and cleaning recipes with ease. The system features a user-friendly interface that allows for intuitive operation and real-time monitoring of process parameters. Users can also store and retrieve process recipes for repeatable results. Another important feature of F-70H is its advanced endpoint detection unit. This machine utilizes optical emission spectroscopy to monitor the plasma emissions during processing and accurately detect the endpoint of the etching or cleaning process. This enables users to precisely control the process and ensure that the desired results are achieved. F70H is equipped with advanced safety features to protect operators and ensure safe operation. The tool is designed with interlock mechanisms to prevent unauthorized access to the process chamber during operation. It also features safety sensors to detect and respond to abnormal operating conditions. Overall, SUMITOMO F-70H is a state-of-the-art etcher and asher asset that offers high performance, versatility, and reliability. With its advanced plasma technology, precise control systems, and user-friendly interface, SUMITOMO F70H is an ideal solution for semiconductor processing applications that require precise etching and cleaning of substrates.
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