Used SUMITOMO SP012 #293776226 for sale
URL successfully copied!
SUMITOMO SP012 is a cutting-edge etcher/asher equipment designed for precise and efficient processing of various materials in semiconductor manufacturing, research, and development applications. With its advanced technologies and high-performance capabilities, SP012 offers unparalleled control and flexibility in etching and ashing processes, making it a valuable tool for achieving high-quality results in a wide range of applications. Key Features and Technical Specifications: 1. Plasma Source Technology: SUMITOMO SP012 is equipped with a high-performance plasma source that generates a highly reactive plasma to efficiently remove photoresist, polymers, and other organic materials from substrates. The plasma source ensures uniform and consistent etching/ashing across the substrate surface, enabling precise patterning and process control. 2. Process Flexibility: SP012 offers a wide range of process parameters and options to accommodate various materials and applications. Users can adjust parameters such as gas flow rates, pressure, temperature, and RF power to tailor the etching/ashing process to specific requirements, ensuring optimal results for different materials and structures. 3. Multi-Step Processing: SUMITOMO SP012 supports multi-step processing capabilities, allowing users to sequentially perform different etching/ashing steps with varying conditions to achieve complex device structures and patterns. The system can be programmed to switch between different process recipes automatically, enhancing productivity and process efficiency. 4. Reactive Gas Control: SP012 features precise control of reactive gases used in the etching/ashing process, enabling users to achieve specific chemical reactions and selectivity for targeted materials. The unit offers gas flow control and mixing capabilities to create custom gas chemistries for different process requirements. 5. Endpoint Detection: SUMITOMO SP012 is equipped with advanced endpoint detection systems that allow real-time monitoring of the etching/ashing process. By detecting changes in plasma emissions or other indicators, the machine can accurately determine when the desired endpoint is reached, ensuring consistent process results and preventing over-etching/ashing. 6. Chamber Design: SP012 features a robust chamber design optimized for process performance and reliability. The chamber is engineered to maintain stable process conditions, minimize particle contamination, and ensure efficient plasma generation and distribution for uniform etching/ashing results. 7. User-Friendly Interface: SUMITOMO SP012 is equipped with an intuitive user interface that simplifies tool operation and process control. The asset offers easy recipe programming, data logging, and monitoring functions, enabling users to set up and run complex etching/ashing processes with ease. Overall, SP012 etcher/asher model is a cutting-edge solution for high-precision and reliable etching/ashing processes in semiconductor manufacturing and research. With its advanced technologies, process flexibility, and user-friendly interface, SUMITOMO SP012 offers superior performance and control for achieving optimal results in a wide range of applications.
There are no reviews yet